Search results for "Janus structure"

Co-GLAD sputtering of tungsten-based nanostructured metallic thin films

2022

A structural and electrical study of tungsten-based metal thin films prepared by co-sputtering GLAD is the subject of this thesis. For this purpose, three different systems (W-W, W-Ag and W-Mo) have been developed using two opposite metallic targets (tilt angle α = 80° with the substrate). In addition to the choice of the second metallic element, different parameters involved in the growth of these films have undergone a variation (working pressure, thickness and second target current) to understand their influence on structural and electrical behaviors of these films. All three systems present a columnar and porous structure. The morphology of these films (especially the inclination of the…